M3-LS LINEAR SMART STAGE
The piezo-driven positioning stage has 0.5 µm resolution for precise, repeatable positioning of optics, probes, sensors and more. Absolute encoding removes the need to home the stage on power-up, eliminating errors and disruptions in processes and experiments.
The M3-LS micro stage has high stiffness and lateral stability, no backlash, and less than 10 µm runout over its full travel range.